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Assura LVS Parameter Mismatch Error

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Hi All,

I'm using Virtuoso Layout XL 617 and Assura 415, with TSMC mixed-mode 130nm PDK.

I included a multi-fingered NMOS moscap into the layout, using the generated parameterized cell. The Cap has 5 fingers, W=L=20um for each, with top&bottom plate connection, and top poly contact head.

 

The cell looked like that above.

However, when running assura lvs, I got the following error:

Schematic Instance: C0 nmos1v
Layout Instance: avD10_1 N

w 2e-05 vs 0.0001 differs by 400%
Layout Instance is the merged result of: avD10_1 avD10_2 avD10_3 avD10_14
avD10_15

While clearly the device has five fingers totaling 100um, ASSURA says it's only 20um. It works only when just 1 finger is used. Is there an explanation to this weird behavior of ASSURA? Thank you very much. -Tony


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